Method of forming organic spacers and using organic spacers to form semiconductor device features

摘要

A method of forming organic spacers using an N₂ plasma or N₂ containing plasma anisotropic etchant, and using such organic spacers for forming features on a semiconductor structure such as vias having a smaller dimension than can be defined by lithographic techniques Other features formed according to the teachings of this invention include Source/Drain (S/D) areas, LDD/extension areas and graded junctions with larger S/D silicide/contact areas. The process for forming the organic spacers comprises conformally coating a patterned semiconductor structure with an organic material such as, for example, an antireflective coating. The coated structure is then anisotropically etched with N₂ plasma or N₂ containing plasma which forms the organic spacers. Organic spacers may be formed by the method of this invention or any other known method and used to form other device features such as (i) larger S/D contact areas, which may include graded junctions; and (ii) larger S/D contact areas and LDD/extensions, which may also include graded junctions with a single implant step.