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Method of reducing leakage using Si3N4 or SiON block dielectric films
Method of reducing leakage using Si3N4 or SiON block dielectric films
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机译:使用Si 3 N 4或SiON块电介质膜减少泄漏的方法
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摘要
A dielectric film block is used in semiconductor processing to protect selected areas of the wafer from silicidation. The selected areas may include resistors. A first layer of oxide is formed on the resistor and a second layer comprising SiON or Si3N4 is disposed on the oxide. A mask is patterned to allow etching to take place in the areas where silicide formation is desired. The oxide layer serves as an etch stop layer during etching of the second layer.
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机译:电介质膜块用于半导体工艺中,以保护晶片的选定区域免受硅化作用。所选区域可能包括电阻器。在电阻上形成第一氧化物层,并且在氧化物上设置包括SiON或Si 3 Sub> N 4 Sub>的第二层。图案化掩模以允许在期望形成硅化物的区域中进行蚀刻。氧化物层在第二层的蚀刻期间用作蚀刻停止层。
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