Method of analyzing silicon-germanium alloys and apparatus for manufacturing semiconductor layer structures with silicon-germanium alloy layers

摘要

In order to improve a method of analyzing Si—Ge alloys, with which a Raman spectrum of a sample is recorded and Raman frequencies and Raman intensities of the Si—Si modes and the Si—Ge modes of the alloy layer are evaluated, such that any strain and any Ge portion in an alloy layer can be ascertained in a simple and as exact a manner as possible, it is provided for one or more spectrum contributions lying outside the Si—Ge modes and the Si—Si modes to be evaluated as oscillation modes.