Polymeric chemical injection into a water jet to improve cut quality while cutting very brittle materials

摘要

The present invention relates to methods and systems for isolating non-rectangular shaped optical integrated circuits formed on a brittle substrate. For example, a brittle substrate comprising a plurality of non-rectangular shaped optical integrated circuits is provided on a water jet cutting system. In the water jet cutting system a mixture of water and at least one water soluble polymer is wet injected into a water stream and then a high pressure polymer water jet is used to cut the brittle substrate. The non-rectangular shaped optical integrated circuits are isolated by water jet cutting in a curvilinear manner without fatally damaging adjacent optical integrated circuits.