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Apparatus and method for mass flow controller with network access to diagnostics
Apparatus and method for mass flow controller with network access to diagnostics
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机译:通过网络访问诊断程序的质量流量控制器的设备和方法
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摘要
A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.
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