首页>
外国专利>
Fresh air ducts including downstream filters for clean rooms
Fresh air ducts including downstream filters for clean rooms
展开▼
机译:新鲜空气管道,包括用于洁净室的下游过滤器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A fresh air duct is configured to direct fresh air filtered by an air conditioning system towards a clean room downstream from the fresh air duct, the fresh air having a first level of particle density. A separate particle filter in the fresh air duct, located downstream from the air conditioning system and upstream from the clean room, is configured to further filter the fresh air to provide filtered fresh air having a second level of particle density therein that is less than the first level. Related methods are also disclosed.
展开▼