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Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method
Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method
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机译:波面像差测量装置,波面像差测量方法以及由该装置制造的投影透镜和方法
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摘要
A method and apparatus for measuring a wave front aberration of a projection lens with high precision and a related calibration method. The apparatus includes: either a light source and an element producing a first point source in combination with the light source or a first point source generating part; a magnifying projection optical system projecting and magnifying a point image of the first point source projected by a test object; a detector detecting the magnified point image projected and magnified by the magnifying projection optical system; a supporting member supporting the magnifying projection optical system and the detector; a calculating part calculating a wave front aberration; and either a second point source producing element or a second point source generating part.
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