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Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material
Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material
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机译:单晶硅带状铰链,用于在SOI材料上进行微镜和MEMS组装
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摘要
Provided is a micro-electromechanical assembly including an out-of-plane device formed on a device layer of a single crystal silicon substrate. A ribbon structure is formed on the device layer, where the ribbon structure has at least one of a width or depth, which is less than the width or depth of the out-of-plane device. A connection interface provides a connection point between a first end of the out-of-plane device and a first end of a ribbon structure, wherein the ribbon structure and out-of-plane device are integrated as a single piece.
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