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Optical component and method of inducing a desired alteration of an optical property therein
Optical component and method of inducing a desired alteration of an optical property therein
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机译:光学部件和在其中引起所需光学性质改变的方法
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摘要
High precision optical components, for example CaF2 lenses in lithographic systems for the production of integrated circuits, often suffer from stress induced birefringence and other imperfections. For altering the optical properties in a confined region of the optical component, the latter is exposed to a beam of ions having an energy preferably in the order 100 MeV/u. This results in a modification of the optical properties due to an interaction of the ions with the surrounding medium the optical component consists of. By carefully choosing the parameters of the process, it is possible to alter the refractive index or the mechanical stress distribution or other optical properties within a confined region of this medium.
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