首页>
外国专利>
Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing
Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing
展开▼
机译:基于波导的并行多相移干涉仪,用于高速计量,光学检查和非接触式传感
展开▼
页面导航
摘要
著录项
相似文献
摘要
An interferometer that contains a tri-coupler to mix light from three different waveguides. The light is emitted from a light source and may be reflected from a test surface. The output of the tri-coupler may be three different light beams that have intensities 120 degrees out of phase from each other. The out-of-phase light beams may be detected by a plurality of photodetectors. The detected out-of-phase light beams may be used to determine a height of the test surface. The waveguides and tri-coupler provide a compact and relatively inexpensive interferometer.
展开▼