The manufacturing process of substrates based on composites for application in microsystems technology

摘要

"The manufacturing process of substrates based on composites for application in microsystems technology.A process of manufacturing substrates of composites based on mixtures of graphite / epoxy for use in microsystems technology was developed.Microsystems have been a scientific field of considerable progress in the last decade.Several devices have been fabricated using microsystems technology, such as micromu00e1quinas for the separation of DNA, eletrocromatu00f3grafos and systems for capillary electrophoresis.In addition to micro devices such as electro mechanical accelerometers, pressure sensors, humidity, pollution, temperature, among others.However, one of the problems that occurs in the construction of these devices is the appropriate choice of the material to be used as a substrate.Although glass and silicon have been excellent materials used in electronics, they do not appear to be the most convenient materials for applications in biological and chemical analyses.Mainly due to incompatibility with movable parts and corrosive reagents.In addition, in the preparation of micro displacement transducer is required for the deposition of thin films of noble metals (gold or plafina) on these substrates.Which increases the cost of production of these devices. Composite is a class of material that can be an alternative low cost to be implemented in microsystems technology.This idea was tested in the development of a manufacturing process of substrate of graphite / epoxy and low cost to be used in the production of micro electrochemical transducers and masksX - rays, used in the development of microsystems.