Specimen holder for an electron microscope, a specimen holder and assembly of an electron microscope and a method for reducing thermal drift in an electron microscope.

摘要

A specimen holder for an electron microscope, comprising a rod-shaped part, which is provided near one end with a tip, which tip is arranged to receive a specimen, the rod-shaped part, in use, extending with at least the tip into the electron microscope, held by clamping means present in the electron microscope, wherein first temperature control means are provided to control the temperature of the rod-shaped part and/or the clamping means, such that this rod-shaped pan and the clamping means substantially have the same temperature, at least at the location of their contact surfaces.