FABRICATION ARCHITECTURE INCLUDING ENTERPRISE RESOURCE PLANNING INTEGRATION

摘要

A semiconductor fabrication facility architecture which includes a fabrication facility, a middleware component, a real time dispatcher application program interface coupled between the fabrication facility and the middleware component, and a work in progress application program interface coupled between the fabrication facility and the middleware component. The fabrication facility includes a manufacturing execution system and a real time dispatch system. The manufacturing execution system tracks overall processing of semiconductor wafers and the real time dispatch system provides near real time information regarding processing of semiconductor wafers. The real time dispatcher application program interface provides a common interface for providing information to the middleware component. The work in progress application program interface provides a common interface for communicating to the fabrication facility from the middleware component.