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OBJECTIVE WITH PUPIL OBSCURATION

机译:小学生闭锁的目的

摘要

Objective (1) having a first partial objective (3) which projects a first field plane (7) onto an intermediate image (11) and comprises a first convex mirror (13) with a first central mirror aperture (15) and a second concave mirror (17) with a second central mirror aperture (19), the first mirror (13) having a first axial spacing from the second mirror (17 )', and the second mirror (17) having a second axial spacing from the intermediate image (11), and the ratio of the first axial spacing to the second axial spacing having a value of between 0.95 and 1.05, in particular between 0.98 and 1.02, and a second partial objective (5), which projects the intermediate image (11) onto a second field plane (9) and comprises a third concave mirror (21) with a third central mirror aperture (23) and a fourth concave mirror (25) with a fourth central mirror aperture (27) 1 the third mirror (21) having from the second field plane (9) a third axial spacing ZM3-IM which has the following relationship with a numerical aperture NA in the second field plane (9) and with a diameter DUM3 of the third mirror (21) : (I), the objective (1) having a Petzval radius whose absolute value is greater than the axial spacing of the first field plane (7) from the second field plane (9) .
机译:物镜(1)具有第一部分物镜(3),其将第一视场平面(7)投射到中间图像(11)上,并且包括具有第一中央镜孔(15)和第二凹面的第一凸面镜(13)。具有第二中央镜孔(19)的镜(17),第一镜(13)与第二镜(17)'具有第一轴向间隔,第二镜(17)与中间图像具有第二轴向间隔(11),以及第一轴向间距与第二轴向间距之比的值在0.95至1.05之间,尤其是在0.98至1.02之间,并且投影第二部分物镜(5),该第二部分物镜投射出中间图像(11)第三镜(21)包括在具有第三中央镜孔(23)的第三凹面镜(21)和具有第四中央镜孔(27)的第四凹面镜(25)1上。从第二场平面(9)起具有第三轴向间距ZM3-IM,该第三轴向间距ZM3-IM具有以下关系在第二场平面(9)中具有数值孔径NA且在第三反射镜(21)中具有直径DUM3:(I),物镜(1)的Petzval半径的绝对值大于透镜的轴向间距。第一场平面(7)从第二场平面(9)开始。

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