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USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES
USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES
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机译:电子斑点干涉在制造设备中的缺陷检测中的应用
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摘要
Electronic speckle interferometry is used to detect submicron-sized indication in fabricated devices, such as membranes. Indications include indentations, deformations or defects. For example, disbonds between a membrane surface and a bonded edge surface can be detected. An acoustic source can be used to excite the membrane. The acoustic source can produce a sine wave to vibrate the membrane. An interference image of the membrane is created to show whether submicron-sized defects exist in the membrane.
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