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MATERIAL SUBJECTED TO VACUUM EVAPORATION, MgO MATERIAL SUBJECTED TO VACUUM EVAPORATION, PROCESS FOR PRODUCING THE SAME AND METHOD OF FORMING FILM

机译:真空蒸发的材料,真空蒸发的MgO材料,其制造方法和成膜方法

摘要

A material subjected to vacuum evaporation that enables increasing the film formation rate and enhancing the controllability of film formation rate at the film formation of the electron beam evaporation process. The material subjected to vacuum evaporation is preferably constituted of MgO. The surface roughness (Ra) of the material subjected to vacuum evaporation is preferably set so as to fall within the range of 1.0 to 10 μm. The effective surface area, taking the unevenness of surface into account, of the material subjected to vacuum evaporation is preferably set so as to fall within the range of 200 to 1200 mm2. The outline volume of the material subjected to vacuum evaporation is preferably set so as to fall within the range of 30 to 1500 mm3. This material subjected to vacuum evaporation can be produced by performing mixing and/or granulation of a powdery raw material of 50 μm or greater average particle diameter into granulation powder and press molding of the granulation powder into a molded item.
机译:一种经受真空蒸发的材料,该材料能够在电子束蒸发工艺的成膜过程中提高成膜速率并增强成膜速率的可控制性。经受真空蒸发的材料优选地由MgO构成。优选将经受真空蒸发的材料的表面粗糙度(Ra)设定为落入1.0至10μm的范围内。考虑到表面的不平整度,优选将经历真空蒸发的材料的有效表面积设定为落入200至1200mm 2的范围内。优选地,将经受真空蒸发的材料的轮廓体积设定为落入30至1500mm 3的范围内。可以通过将平均粒径为50μm以上的粉状原料混合和/或造粒成粒状粉末,然后将该粒状粉末压制成型,来制造进行真空蒸镀的材料。

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