AUTOMATIC REFERENCE POSITION TEACHING METHOD, AUTOMATIC POSITIONING METHOD, AND AUTOMATIC CARRYING METHOD FOR DISK-LIKE OBJECT, AUTOMATIC REFERENCE POSITION TEACHING DEVICE, AUTOMATIC POSITIONING DEVICE, AND AUTOMATIC CARRYING DEVICE FOR DISK-LIKE OBJECT USING THESE METHODS, AND AUTOMATIC SEMICONDUCTOR MANUFACTURING EQUIPME

摘要

An automatic reference position teaching method for disk-like object capable of increasing a productivity by automating reference position teachings at ports and a positioning in a stationary production process when equipment is started in a semiconductor manufacturing equipment having a positioning device and a carrying robot, comprising the steps of detecting two points W1 and W2 where the circumference of a disk-like object (47) such as a wafer crosses the locus (43) of a detection means, and calculating the center position A of the disk-like object by using these two points, a specific point O on the vertical bisector (42) of a line segment connecting these two points, and the radius r of the disk-like object, whereby positioning operation can be performed by the carrying robot, and not only the correction of a carrying route but also the reference position teaching at the time of starting of the equipment can be automated by using the results of the positioning operation. When a cutout part is present in the disk-like object, the circumference of the disk-like object is detected by two loci of the detection means to find out a correct center position, and the circumference of the disk-like object with an unknown radius is detected by three loci of the detection means to obtain the radius so as to allow a mixed production using wafers with different diameters.