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Micromirror with electrostatically controlled microshutter, array of micromirrors and infrared spectrophotometer comprising said array
Micromirror with electrostatically controlled microshutter, array of micromirrors and infrared spectrophotometer comprising said array
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机译:具有静电控制的微快门的微镜,微镜阵列和包括所述阵列的红外分光光度计
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摘要
An optic device with a variable operating mode comprises a micromirror (M) which can be obscured by means of an electrostatically controlled microshutter (6). In the operating condition of the microshutter, the petal (6) of this adheres over a substrate (2, 3, 4, 5) to allow a beam of light (L) to reach the mirror (M). In the condition at rest, the petal (6) is curled up and one of its surfaces (6b) receives the beam of light (L) and reflects it in all directions, at the same time preventing this from reaching the mirror (M).
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