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HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS
HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS
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机译:使用激发原子的高密度等离子体源
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摘要
A plasma source which includes a cathode assembly (202) and an anode (226)positioned adjacent to the cathode assmebly. An excited atom source generates an initial plasma and excited atoms from a volume of feed gas. The initial plasma and excited atoms are located proximate to the cathode assembly. A power supply generates an electric field between the cathode assembly and the anode. The electric field super-ionizes the initial plasma so as to generate a high-density plasma.
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