HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS

摘要

A plasma source which includes a cathode assembly (202) and an anode (226)positioned adjacent to the cathode assmebly. An excited atom source generates an initial plasma and excited atoms from a volume of feed gas. The initial plasma and excited atoms are located proximate to the cathode assembly. A power supply generates an electric field between the cathode assembly and the anode. The electric field super-ionizes the initial plasma so as to generate a high-density plasma.