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SYSTEM AND METHOD FOR FAST AMBIENT GAS SWITCHING IN RAPID THERMAL PROCESSING
SYSTEM AND METHOD FOR FAST AMBIENT GAS SWITCHING IN RAPID THERMAL PROCESSING
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机译:快速热过程中快速环境气体切换的系统和方法
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摘要
A method and apparatus for thermal processing of a workpiece is provided. The time taken for a processing gas to be purged, or switched, during one or more processing steps is significantly reduced for thermal processing systems. The thermal processing system includes a heating chamber in accordance with one example embodiment of the present invention. A small-volume workpiece enclosure is disposed about the workpiece. A translation mechanism, e.g., in the form of a positioning assembly, supports the small-volume workpiece enclosure for moving the small-volume workpiece enclosure and the workpiece within the heating chamber. The small-volume workpiece enclosure enables the use of relatively smaller amounts of process (ambient) gases, and decreases the purge time of such gases. The heating chamber can have at least one of a thermal radiation intensity gradient and a temperature gradient for thermally processing the workpiece. The heating chamber can have one or more heating elements disposed about the heating chamber.
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