TEST STRUCTURES FOR ESTIMATING DISHING AND EROSION EFFECTS IN COPPER DAMASCENE TECHNOLOGY

摘要

First structure (1010) and the second structure (1000) Corrosion Evaluation are extracted failure scale distribution by a kind of test structure. First structure (1010) is that ring structure may be used to determine those metallic resistance values with height. Second structure is a kind of NEST structures (1000). The ring structure (1010) of loop is connected to the NEST structures (1000) of two sides.