MANUFACTURING METHOD OF STRUCTURAL PATTERN AND WIRING STRUCTURE AS WELL AS MANUFACTURING METHOD OF ELECTRON SOURCE AND IMAGE DISPLAY DEVICE

摘要

PURPOSE: A manufacturing method of a structural pattern is provided to be capable of obtaining a highly reliable insulation performance and conductive performance. CONSTITUTION: A manufacturing method of a structural pattern equipped with a patterned structure on a substrate is provided with a first exposing process for exposing a required region of a negative type photosensitive material(4) given on the substrate(1) from a first direction, a second exposing process for exposing from a direction contrary to the first direction, a development process for forming a precursor pattern of the structure by developing it after the exposing processes, and a process for baking the precursor pattern.