The generation method of TixOy system material and the oxidation material of Ti system used micro-hallow emission

摘要

PURPOSE: Provided is a method for producing titanium oxide-based materials using micro-hollow cathode emission, which is processed under atmospheric pressure, and reduces the cost and increases the productivity in the field of advanced materials. CONSTITUTION: The method comprises the steps of generating oxygen plasma or ozone by micro-hollow cathode emission, and oxidizing a titanium-based substance by the oxygen plasma or ozone to form a titanium oxide-based material(TixOy). In particular, the titanium oxide-based material(TixOy) is titanium dioxide(TiO2). In the case of a dental implant material, the method further comprises the step for forming an implant having a desired shape from a titanium-based material. Then, the implant is coated with the stable TixOy layer produced by the aforesaid method.