Vacumm Ion Pump Controller based on Software and Microprocessor and Measuring Method of Vacumm Using the same

摘要

PURPOSE: A software-based vacuum ion pump controller and a method for measuring a vacuum degree by using the same are provided to achieve a system by using micro processors capable of making communication with each other. CONSTITUTION: A software-based vacuum ion pump controller includes a calculating section and a display section which are communicated with each other. The calculating section has a high voltage switch, a memory, and a converting section. The display section has an output device and a keyboard. The high voltage switch turns on/off a high voltage generator. The memory is connected to the micro processor so as to store a digital value of measuring data of the software-based vacuum ion pump controller. The converting section converts a current value into a digital value. The output device outputs vacuum degree values. A correction value of parameter is inputted into the keyboard.