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PLASMA REACTOR COIL MAGNET SYSTEM

机译:等离子体反应器线圈磁铁系统

摘要

A method for processing a workpiece is carried out with a plasma derived from a process gas in a plasma chamber of a plasma processing apparatus during a plasma processing operation. The apparatus includes an array of electromagnets mounted circumferentially around the plasma chamber. The method comprises generating a plasma from a process gas within the chamber and causing plasma particles to strike the workpiece, selecting distributions of current signals for the electromagnets, and applying each selected distribution to the electromagnets to impose more than one magnetic field topology on the plasma during the plasma processing operation.
机译:在等离子体处理操作期间,在等离子体处理设备的等离子体室中用源自处理气体的等离子体执行处理工件的方法。该设备包括围绕等离子体室周向安装的电磁体阵列。该方法包括:从腔室内的处理气体产生等离子体,并使等离子体粒子撞击工件;为电磁体选择电流信号的分布;以及将每个选择的分布应用于电磁体,以在等离子体上施加一个以上的磁场拓扑在等离子处理过程中。

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