During plasma processing operations, in a plasma chamber of a plasma processing apparatus, the present invention is a method for processing a workpiece is performed using a plasma generated from the process gas. The device comprises an array of electromagnets mounted so as to surround the periphery of the plasma chamber. The method includes the steps of: generating plasma from the process gas within the chamber above; said electromagnet; said select placement of the current signal supplied to the electromagnet; collide with the workpiece plasma particles to give the arrangement of each of the selected thereby exert a magnetic field one or more forms in the plasma during plasma processing operations.
展开▼
