COATING SOLUTION SUPPLY DEVICE AND SLIT COAT-TYPE COATING DEVICE PROVIDED WITH THE DEVICE TO PREVENT UNUNIFORMITY OF THICKNESS OF COAT EVEN IN CASE OF INCREASE OF COATING VELOCITY

摘要

PURPOSE: A coating solution supply device and a slit coat-type coating device provided with the device are provided, to prevent the ununiformity of thickness of coating even when a coating velocity is increases. CONSTITUTION: The coating solution supply device comprises a coating solution supply means which is extended between a coating solution source and the coat head(14) of a slit coat-type coating device(12'); a pump(10c) which pressurizes the coating solution in the coating solution supply means; an opening/closing valve(10d) which is located between the pump and a coat head; a coating solution pressure detecting means(10f, 10f') which detects the pressure of the coating solution pressurized by the pump to output the coating solution pressure signal; and a coating solution pressure control means(10g) which controls the operation of the pump to make the pressure of the coating solution pressurized by the pump be a desired value before the valve is open for coating the coating solution with a desired thickness on a substrate by the coat head.