3 Micro-Motion Machine and Micro-Element Fabricating Machine Using 3 Degree of Freedom Parallel Mechanism

摘要

PURPOSE: A micro motion machine using a three-degree of a freedom parallel manipulator and a micro part processing machine are provided to improve accuracy, increase a working space and manufacture various micro parts by applying the three-degree of the freedom parallel manipulator. CONSTITUTION: A micro motion machine(30) comprises three prismatic flexible joints and a platform. First and second arms are connected to upper ends of first and second prismatic flexible joints with a revolute flexible joint(39,41). First and second arms are connected to a platform from a lower portion. A third arm is connected to a side of a connecting block(51) of a third prismatic flexible joint with a universal flexible joint(43,45,47,50). The third arm is connected to a side of the platform with the universal flexible joint. Therein, movement of three degrees of a freedom parallel manipulator is possible. Consequently, rigidity, positional deviation and currency are improved. A three dimensional micro part is manufactured by rotating the platform between plus fifty and minus fifty degrees.