AUTOMATIC MATERIAL ADJUSTING SYSTEM, PRODUCTION SYSTEM OF SEMICONDUCTOR DEVICE, AND METHOD FOR ADMINISTERING PRODUCTION OF SEMICONDUCTOR DEVICE, CAPABLE OF BEING USED FOR MANAGING PRODUCTION LINE OF SEMICONDUCTOR DEVICE, USING AGV

摘要

PURPOSE: An automatic material adjusting system, a production system of a semiconductor device, and a method for administering production of semiconductor device are provided to prevent a substrate and the manufacturing system from being contaminated and to manage an AGV(Automatic Guided Vehicle) and a carrier easily. CONSTITUTION: An auto-guided vehicle includes a vehicle body(103), first and second filters(105,106), a shutter(104) and a pump(109). The vehicle body includes a space for containing a carrier for containing the substrate. The pump introduces air filtered through the first filter. The air introduced to the space is filtered by the second filter and the filtered air is emitted from the space. The space is separated from outside when the shutter is closed. Each of the first and second filters is one of an ULPA(Ultra-high Efficiency Particulate Arrestor) filter and a HEPA(High Efficiency Particulate Arrestor) filters. The second filter includes a filter member which includes a positive ion exchange fiber.