METHOD FOR FABRICATING REFLECTIVE/PROTECTIVE OVERLAYERS MAGNETICALLY ARRAYED ON A MAGNETORESISTANCE SENSOR, AND THE MAGNETORESISTANCE SENSOR, ESPECIALLY IN RELATION TO AN OXIDE STRUCTURE FOR COVERING A FREE LAYER

摘要

PURPOSE: A method for fabricating reflective/protective overlayers magnetically arrayed on an MR(Magnetoresistance) sensor and the MR sensor are provided to guarantee a high-quality border between a covered oxide structure and a lower sensor structure, and to oxidize the border after depositing a metal buffer layer, thereby realizing an easy control. CONSTITUTION: A sensor structure having a free layer deposited on a lower layered structure is provided(60). An oxide structure for covering the free layer is deposited(62). The step of depositing the oxide structure(62) comprises the steps as follows. A metal buffer layer is deposited while covering the free layer(64). An overlayer is deposited while covering and contacting the metal buffer layer(66). To form a metal buffer layer oxide, the metal buffer layer is oxidized(68).