/ MEMS pH sensor having Ag/AgCl electrode structure and fabrication method for them thereof

摘要

PURPOSE: An MEMS pH sensor having an Ag/AgCl electrode structure and a method for manufacturing the same are provided to expand life span of the MEMS pH sensor by minimizing loss of an Ag/AgCl electrode in KCl solution. CONSTITUTION: A pair of Ag layers including solvent and powder are obtained by silk printing Ag paste on a silicon wafer(22). After removing a solvent component from the Ag layers, a powder component of the Ag layers is cured, thereby obtaining a pair of cured Ag layers. Then, the cured Ag layers are subject to an electrolysis process in such a manner that an AgCl layer is formed on an upper surface of the Ag electrode, thereby forming a pair of Ag/AgCl electrodes. The Ag/AgCl electrodes are formed on a reference electrode(14) and a detection electrode(16) of the MEMS pH sensor.