METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE PANEL BY FORMING ONE OR ORGANIC LIGHT EMITTING LAYER, ELECTRON INJECTION LAYER AND ELECTRON TRANSPORT LAYER BY DEPOSITION THROUGH MASK HOLES OF MULTILAYER METAL MASK, AND ORGANIC ELECTROLUMINESCENCE PANEL

摘要

PURPOSE: A method and an organic electroluminescence panel are provided to obtain an organic electroluminescence panel with high precision and high quality by using a metal mask with improved reliability and mechanical strength. CONSTITUTION: A method comprises a step of forming at least one or an organic light emitting layer, an electron injection layer and an electron transport layer by a deposition of a deposition material through mask holes of a multilayer metal mask(100) which is arranged in tight contact with an insulation layer of a transparent substrate. In the multilayer metal mask, the material of the metal layer of transparent substrate side is different from the material of the metal layer of deposition material supply source side. At least one of the metal layer except the metal layer of transparent substrate side is constituted by a thick plate made of a magnetic material. The mask hole of the metal layer of transparent substrate side has an area same as or smaller than the area of the mask hole of the metal layer of deposition material supply source side.