ELECTRON BEAM RECORDING DEVICE AND AN ELECTRON BEAM IRRADIATED POSITION DETECTING METHOD, ESPECIALLY IN RELATION TO THAT A SIGNAL IS SPIRALLY RECORDED ON A MASTER OF AN INFORMATION RECORDING MEDIUM SUCH AS AN OPTICAL DISK

摘要

PURPOSE: An electron beam recording device and an electron beam irradiated position detecting method are provided to record an electron beam on a master, and to detect an irradiated position change of the electron beam, thereby recording patterns on the master. CONSTITUTION: An electron beam source(101) generates an electron beam(120). An electron optical system(102) processes the emitted electron beam(120) before transmitting the beam on a resist master(109), and records information patterns on the resist master(109) according to an inputted information signal. The electron beam source(101) and the electron optical system(102) are installed within a vacuum container(113). The electron optical system(102) comprises as follows. A lens(103) receives the electron beam(120). An aperture(104) determines a diameter of the electron beam(120). Electrodes(105,106) deflect a direction of the electron beam(120) in right-angled direction. A shield plate(107) shields the electron beam(120) curved by the electrode(105). A lens(108) processes the electron beam(120) before transmitting the beam on a surface of the resist master(109).