METHOD FOR STORING RECIPE FILE FOR SEMICONDUCTOR FABRICATION EQUIPMENT TO PREVENT BUG OF SOFTWARE DUE TO VERSION OF OPERATING PROGRAM

摘要

PURPOSE: A method for storing a recipe file for semiconductor fabrication equipment is provided to prevent a bug of software due to a version of an operating program by representing the current version of the operating program on a file name and a file extension of the recipe file. CONSTITUTION: A worker generates a new recipe file by using an operating program(S10). The worker inputs predetermined contents into the recipe file(S20). The predetermined contents include a rotation speed value of a polishing head and a pressure value applied to the polishing head. The worker inputs a file name and a file extension of the recipe file and a current version of the operating program(S30). The worker stores the recipe file(S40).