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APPARATUS FOR INSPECTING OPTICAL ELEMENTS IN WHICH LIGHT RADIATED FROM AN OPTICAL MODULE IS TRANSFERRED TO A BEAM SPLITTER THROUGH A FIRST OPTICAL PATH CONVERTER
APPARATUS FOR INSPECTING OPTICAL ELEMENTS IN WHICH LIGHT RADIATED FROM AN OPTICAL MODULE IS TRANSFERRED TO A BEAM SPLITTER THROUGH A FIRST OPTICAL PATH CONVERTER
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机译:通过第一光学路径转换器将从光学模块发出的光线透射到光束分离器中的光学元件检查装置
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摘要
PURPOSE: An optical element inspection apparatus is provided to precisely inspect optical characteristics of optical elements by using an interferometer employing various wavelengths. CONSTITUTION: An optical element inspection apparatus includes a plurality of light sources, a beam splitter(15) for splitting light radiated from the light sources, and first and second reflection mirrors(25,30). The light sources include first light source(3) for radiating a first color light having a first wavelength, a second light source(5) for radiating a second color light having a second wavelength, and a third light source(10) for radiating a third color light having a third wavelength. The first and second light sources(3,5) are provided as an optical module(8). The light radiated from the optical module(8) is transferred to the beam splitter(15) through a first optical path converter(12).
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