SEMICONDUCTOR WAFER TRANSFERRING APPARATUS WITH SAFETY UNIT TO PREVENT OPERATOR FROM COLLIDING WITH TRANSFER UNIT IN TRANSFER OPERATION

摘要

Purpose: the semiconductor piece transfer with a safety unit is arranged to prevent a people with by detecting whether that people enters the transfer unit collision in a transfer operation in a region in the transported place of transfer unit. Construction: for receives to-be-multiple wafer cassettes (1) of processed wafer or processed wafer are installed in a pedestal (3), one scheduled wafer transfer zone of preparation. One transfer unit (10) includes a wafer chuck, picks up from the lower part of wafer cassette increase cumulative multiple chips as a propeller simultaneously, be both horizontally and vertically transferred to one side of pedestal. One ship is mounted in the base, can vertically be shifted. Multiple chips are aboard ship received. The process chamber that wherein increased ship is received is side's installation aboard ship, so that a process is performed in process chamber. One detection unit (20) detects whether that a detection target enters Transport And Transformation, installs at the front surface both ends of pedestal.