SYSTEM FOR MANAGING TOTALLY SPINNER IN SEMICONDUCTOR FABRICATION PROCESS AND CONTROLLING METHOD THEREOF TO MONITOR TEACHING STATE OF ROBOT ARM

摘要

PURPOSE: A system for managing totally a spinner in a semiconductor fabrication process and a controlling method thereof are provided to monitor a teaching state of a robot arm of the spinner by using plate temperature of a process unit. CONSTITUTION: A spinner(10) includes a robot arm for transferring a wafer, a plurality of process units, and a plate temperature sensor for outputting temperature data by sensing plate temperature of the process units. A server(30) is connected to a network and is used for collecting the temperature data. A client(40) is connected to the network, stores the collected temperature data, and monitors a teaching state of the robot arm by analyzing the temperature data. The client sets up and controls an interlock due to a teaching error of the robot arm if the temperature data does not belong to a particular range to set up the interlock.