ROBOT ARM END EFFECTER AND USING METHOD THEREOF TO FIX STABLY WAFER ON ROBOT ARM END EFFECTER

摘要

Purpose: robot arm end effect and its application method are arranged to repairing a chip with being used to support the robot arm end effect stability of the moving position of chip by both ends. Construction: robot arm end effect includes robot the first arm end effect (101) and robot the second arm end effect (102). First and second robot arm end effecters are entered by division robot arm end effect to be longitudinally formed. One interval control unit controls the interval between the first and second robot arm end effecters. Interval controller is made of for one end of the first arm of robot end effect for linear motion and one end of robot the second arm end effect a linear movement units from a robot arm coupling part.