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cantilever for high sensitivity piezoresistive of Atomic Force Microscope type
cantilever for high sensitivity piezoresistive of Atomic Force Microscope type
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机译:悬臂,用于原子力显微镜类型的高灵敏度压阻
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摘要
Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.
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