Electrically-controlled geometric filters, ion energy analyzers with these filters, and fabrication of geometric filters

摘要

The present invention relates to an ion energy analyzer having a microchannel plate in which geometric filtering characteristics are electrically controlled, the analyzer comprising a metal collector, a control grid and a microchannel plate, all of which are cylindrically stacked, , The separator (control) grid and the microchannel plate are separated by a ceramic insulating washer, the control element being formed in each of the holes of the microchannel plate to control the critical angle of each hole, A voltage is applied to the control element so that the critical angle of the microchannel plate can be electrically controlled and the specific ion trajectory can be selected to flow into the ion energy analyzer by varying the magnitude of the electric field.