APPARATUS FOR SUPPLYING POWER OF PREVENTING ERRONEOUS OPERATION OF FACILITIES ACCORDING TO TEMPORARY INTERRUPTION OF ELECTRIC POWER AND SEMICONDUCTOR MANUFACTURING FACILITIES USING THIS

摘要

A power management system for semiconductor manufacturing prevents malfunctions of loading devices when transient power interruption occurs by maintaining power to the facilities for a period of time after the transient power interruption occurs. The system includes an emergency cutoff circuit, a first power controller, and a second power controller. The emergency cutoff circuit prevents trips in a power relay for one second at the time of transient power interruption. The first power controller discharges a DC voltage for a predetermined time period when AC power is not supplied through a power supply line thereto due to transient power interruption. The second power controller receives the DC voltage provided from the first power controller and discharges the DC voltage during a transient power interruption.