Environmentally Benign Group II and Group IV or V Spin-On Precursor Materials

摘要

PURPOSE: A metal-acid salt complex, its preparation method, a metal-acid salt complex solution containing the complex and a preparation method of an electrical device using the complex are provided, wherein the complex is a spin-on precursor material useful for preparing a thin oxide film and an electronic device. CONSTITUTION: The metal-acid salt complex comprises a first metal containing at least one ion of the group II and at least one second metal selected from the group IV and V; and a polyether acid. Preferably the ion of the group II is Ba or Sr; the ion of the group IV is Ti or Zr; the ion of the group V is vanadium, Ta or Nb; and the polyether acid is represented by CH3O(CH2CH2O)nCH2COOH, wherein n is 0-2. The metal-acid salt complex is prepared by mixing at least one first metal selected from the group II, reacted with the polyether acid with at least one metal alkoxide comprising at least one second metal selected from the group IV and V and a polyether acid anhydride.