PLANE MAGNETIC SENSOR AND PLANE MAGNETIC SENSOR FOR MULTIDIMENSIONAL MAGNETIC FIELD ANALYSIS

摘要

A plane magnetic sensor or a plane magnetic sensor for a multidimensional magnetic field analysis which can measure a magnetic field over a wide area in a short time is provided. A plane magnetic sensor 10 according to the present invention comprises a sensing layer 11 made of a magnetoresistance effect film formed in a planar state with an arbitrary size, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic fine particles change according to the strength of a magnetic field, and conductor layers 12, 13 laminated on respective surfaces of the magnetoresistance effect film and are made of a plurality of line conductor films 12a, 13a formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween. The line conductor films 12a of one conductor layer 12 and the line conductor films 13a of the other conductor layer 13 are arranged to intersect to each other in plan view, with the magnetoresistance effect film therebetween. IMAGE