A method for preparing super fine cerium oxide abrasive, an abrasive prepared thereby and an use thereof for polishing a substrate

摘要

PURPOSE: Provided are a method for producing a supermicron cerium oxide abrasive, an abrasive produced by the method, and a method for abrading a substrate using the abrasive. CONSTITUTION: The method for producing a supermicron cerium oxide abrasive comprises the steps of (i) adding water to cerium oxide powder having a median value of particle size of 10 micrometer or more with mixing to obtain a mixed slurry; (ii) introducing the mixed slurry into stirring mill filled with 1-3 of alumina ball or zirconia ball; (iii) slowly adding alkalinizing agents into the stirring mill to adjust a pH of the mixed slurry to 8-10; (iv) introducing 1-5 wt%(based on weight of the cerium oxide) of polyacrylic acid ammonium salt having an average molecular weight of 300-600 into the stirring meal; (v) stirring the mixed slurry at 200-600 rpm for 1-3 hours to primarily crush the slurry; (vi) introducing the crushed slurry into stirring mill filled with 0.3-0.7 of alumina ball or zirconia ball; and (vi) stirring the mixed slurry at 200-600 rpm for 1-3 hours to secondarily crush the slurry.