GLOW DISCHARGE CELL WITH HOLLOW CATHODE RAY TUBE OF SPECTROMETRY ANALYZING SYSTEM

摘要

PURPOSE: A glow discharge cell for spectroscope system having a hollow cathode tube is provided to generate plasma over 5000K by applying high current to the cathode tube and an anode tube with cooling air and coolant constantly. CONSTITUTION: A spectroscope system has a gas/sample supply unit, a discharge unit, a light measuring unit(120) and a data analyzing unit. The discharge unit includes a discharge cell(300), a power unit(220), a coolant supply unit(210) and a vacuum pump(230). The discharge cell has a case, a cathode tube(351) and an anode tube(355). A front case(310) is communicated with the gas/sample supply unit on one side. A rear case(320) is combined with the other side of the front case. The other side of the rear case is combined to the light measuring unit. Cathode and anode tubes insulating each other are installed inside the case. The power unit applies high current to cathode and anode tubes on a side of the discharge cell. The coolant supply unit supplies coolant to the case to cool cathode and anode tubes on the other side of the discharge cell. The vacuum pump maintains the inside of the case vacuum and exhausts gas exhausted with plasma outside the case. Therefore, cooling efficiency is improved by cooling a glow discharge cell with air and coolant. Plasma is discharged stably by applying high current to cathode and anode tubes for long time.