METHOD OF INTERFERENCE MEASUREMENT OF FORM OF SURFACE OF OPTICAL PARTS

摘要

FIELD: measurement technology. SUBSTANCE: method of interference measurement of form of surface of optical parts includes recording of interference picture by photography on transparent carrier, illumination of recorded interferogram in angle interval from β to α+β, where α is angle of light diffusion by interferogram; β- is front aperture angle of analyzing optical system, and subsequent analysis of light image. Interferogram is also illuminated by second light source in angle interval from 0 to β, Inteferogram is illuminated by first and second light sources in antiphase. EFFECT: expanded functional potential of method of observation of interference fringes in light diffusion. 1 dwg