Measurement of the relative positions of at least two surfaces, e.g. for use in the manufacture of semi-finished goods, whereby an optical interference measurement probe is used that generates at least two measurement beams

摘要

Method for measuring at least a test surface and a reference surface with an interference measurement probe that emits a first measurement beam towards a reference test surface and at least a second measurement beam towards at least a second test surface. An independent claim is made for a device for measuring at least a test surface and a reference test surface.