Micromechanical component used as a sensor or actuator comprises a substrate having an insulation region, a trench structure arranged in the insulation region, closure regions having sensor devices, and non-closed second regions

摘要

Micromechanical component comprises substrate (1) with insulation region (4) on front side of substrate, trench structure (2', 3') arranged in insulation region, closure regions (6, 8, 14) provided on insulation region for closing first regions of trench structure and having sensor devices (10, 12a, 12b), and non-closed second regions of trench structure which thermally insulate parts of sensor devices from substrate. An Independent claim is also included for a process for the production of the micromechanical component.