Production of halodisilazanes comprises reaction of a disilazane with a halosilane in a counter-current reaction column

摘要

A process for the production of halodisilazanes comprises reaction of a disilazane with a halosilane in a counter-current reaction column. A process for the production of halodisilazanes of formula (1) comprises reaction of a disilazane of formula (2) with a halosilane of formula (3) in a counter-current reaction column. RnX3-nSi-NH-SiR3 (1) R3Si-NH-SiR3 (2) RnSiX4-n (3) R : 1-20C hydrocarbon; X : halogen; n : 0-2.